| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect inspection method and program which makes it possible to inspect a pattern for defects efficiently in consideration of its level of importance. <P>SOLUTION: The inspection method includes the steps of: determining a region to be scanned; calculating scanning efficiency; prioritizing regions to be scanned; determining the scan path for scan lines; and sweeping the scan lines to scan the subject according to the determined scan path. A preliminary scan path consisting of a plurality of scan lines necessary to scan a region to be inspected is set, and the set preliminary scan path thus is used to specify the region to be scanned. The scanning efficiency is calculated for each of the specified regions to be scanned. The prioritization of the regions to be scanned is executed on the basis of the obtained scanning efficiency. The scan path of scan lines is determined by eliminating some of the plurality of scan lines on the basis of the obtained prioritization. <P>COPYRIGHT: (C)2013,JPO&INPIT |
