摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a high-performance solar cell with high photoelectric conversion efficiency, capable of efficiently manufacturing the solar cell, and the solar cell obtained by the method. <P>SOLUTION: An organic solvent based coating liquid for diffusing a low-concentration dopant is applied on an entire surface of a semiconductor substrate 1 by the spin coating, an aqueous coating liquid for diffusing a high-concentration dopant containing a polyvinyl alcohol-based resin, is partly applied on a surface of the semiconductor substrate 1 by the screen printing, then heat treatment is performed. On the surface of the substrate 1, a surface layer part of the semiconductor substrate 1 where a full coating by the spin coating and a partial coating by the screen printing are overlapped, becomes a high-concentration dopant diffusion part 11a, and a surface layer part of the semiconductor substrate where an only full coating is formed by the spin coating, becomes a low-concentration dopant diffusion part 11b, and a selective emitter layer 11 consisting of the diffusion parts 11a, 11b is formed on the semiconductor substrate 1. <P>COPYRIGHT: (C)2013,JPO&INPIT |