| 摘要 |
Provided is a charged particle beam microscope which has an emitter tip exhibiting a small mechanical oscillation amplitude, is capable of producing ultra-high resolution sample observation images, and eliminates blurring in the sample observation images. More specifically, provided is a charged particle beam microscope which is equipped with a gas field ionization source having an emitter tip for generating ions, an emitter base mount for supporting the emitter tip, a mechanism for heating the emitter tip, an extraction electrode provided facing the emitter tip, and a mechanism for supplying gas to the vicinity of the emitter tip. The gas field ionization source is characterized in that: the emitter tip heating mechanism heats the emitter tip by electrifying a filament connecting at least two terminals; the terminals are connected by a V-shaped filament; the angle of the V-shape is obtuse; and the emitter tip is connected approximately to the centre of the filament. |
