发明名称 EXPOSURE MASK FOR WAFER LEVEL PACKAGE AND METHOD FOR MANUFACTURING PACKAGE BY USING THE SAME
摘要 PURPOSE: An exposure mask for a wafer level package and a method for manufacturing the package using the same are provided to prevent misalignment by forming a first and a second aligners in an exposure mask. CONSTITUTION: A wafer pattern region(202) forms a die street pattern. The die street pattern separates multiple die patterns from one another. A first aligner(204) separates the wafer pattern region to surround the wafer pattern region. A pair of second aligners(206a,206b) is closely formed in all sides of the wafer pattern region. The second aligner includes align patterns.
申请公布号 KR101254153(B1) 申请公布日期 2013.04.18
申请号 KR20110092480 申请日期 2011.09.14
申请人 发明人
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
主权项
地址