CLOSED LOOP PROCESS FOR PREPARING TRICHLOROSILANE FROM METALLURGICAL SILICON

摘要

The present invention relates to a multistage process for preparing trichlorosilane and silicon tetrachloride from metallurgical silicon, in which trichlorosilane and silicon tetrachloride are prepared from metallurgical silicon in a first step, and the silicon tetrachloride is processed further to the trichlorosilane end product in a second step. The present invention further relates to a plant in which such processes can be performed in an integrated manner.