LASER DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

摘要

A laser device having master oscillators that output seed beams is provided. The seed beams are guided from the master oscillators to a regenerative amplifier such that at least one of the seed beams enters the regenerative amplifier at an angle that differs from an angle at which another seed beam enters the regenerative amplifier. A laser apparatus and an extreme ultraviolet light generation system using the laser device are also provided.