发明名称 WASTE MACHINING FLUID CIRCULATION DEVICE AND WASTE MACHINING FLUID CIRCULATION METHOD
摘要 <p>Provided are a waste machining fluid circulation device and a waste machining fluid circulation method which are capable of maintaining the pH value of a machining fluid within a predetermined range. A waste machining fluid circulation device supplies a machining fluid to a machining device (1), circulates a used machining fluid, and supplies the used machining fluid again to the machining device (1). The waste machining fluid circulation device comprises a pH value measurement means (20) which measures the pH value of the used machining fluid, and is provided with a control means (30) which, according to the pH value measured by the pH value measurement means (20), controls whether or not a neutralizer is supplied to the used machining fluid. The control means (30) transmits, to a supply means (24), a supply instruction signal for supplying the neutralizer when the measured pH value is outside a predetermined range, and transmits, to the supply means (24), a supply stop signal for stopping the supply of the neutralizer when the measured pH value is within the predetermined range.</p>
申请公布号 WO2013054577(A1) 申请公布日期 2013.04.18
申请号 WO2012JP68272 申请日期 2012.07.19
申请人 MURATA MANUFACTURING CO.,LTD.;YOSHIDA TSUTOMU 发明人 YOSHIDA TSUTOMU
分类号 H01L21/301;B23Q11/10 主分类号 H01L21/301
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