发明名称 |
OPTICALLY TRANSPARENT AND ELECTRICALLY CONDUCTIVE COATINGS AND METHOD FOR THEIR DEPOSITION ON A SUBSTRATE |
摘要 |
The present inventions relates to a substrate for a photolithographic mask comprising a coating deposited on a rear surface of the substrate, wherein the coating comprises (a) at least one electrically conducting layer, and (b) wherein a thickness of the at least one layer is smaller than 30 nm, preferably smaller than 20 nm, and most preferably smaller than 10 nm. |
申请公布号 |
WO2013053889(A1) |
申请公布日期 |
2013.04.18 |
申请号 |
WO2012EP70260 |
申请日期 |
2012.10.12 |
申请人 |
FUNDACIO INSTITUT DE CIENCIES FOTONIQUES;INSTITUCIO CATALANA DE RECERCA I ESTUDIS AVANCATS;CARL ZEISS SMS GMBH |
发明人 |
PRUNERI, PROF. VALERIO;CARRILERO, DR. ALBERT;PETERS, DR. JAN-HENDRIK |
分类号 |
G03F1/22;G03F1/38 |
主分类号 |
G03F1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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