| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating device and a coating method of the same, allowing stable coating with desired weight per area after a coating start even if the coating liquid has high thixotropy. <P>SOLUTION: This coating device includes a coating liquid path through which the coating liquid is circulated from a coating head (2) to coating liquid tank (3), and includes a pump (3) allowing the circulation at a pressure not less than the internal pressure of the coating head (2) in time of the coating at which the desired weight per area is obtained. Thereby, a pressure inside the coating head (2) is kept not less than a pressure in time of the coating until just before the coating, and the coating liquid can be fluidized. As a result, coating liquid viscosity at the time of the coating start is reduced, and fluidity is secured, so that the fluctuation of the weight per area from the coating start can be suppressed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
