| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical deflector suitable for miniaturization. <P>SOLUTION: An optical deflector comprises: a substrate 150; a pair of driving electrodes 120A and 120B provided on the substrate 150; a pair of fixed parts 107 fixed on the substrate 150; a pair of hinges 110 respectively connected to the pair of fixed parts 107; a connecting part 105 rockably supported by the pair of hinges 110; a support column 102 fixed to the connecting part 105; and movable plate 101 fixed to the support column 102. The movable plate 101 is supported at a space from the substrate 150 so as to face the driving electrodes 120A and 120B. The movable plate 101 comprises: a counter electrode on a first surface facing the driving electrodes 120A and 120B; and a reflecting surface 103 on a second surface at a side opposite to the first surface. The driving electrodes 120A and 120B, the fixing part 107, the hinges 110 and the connecting part 105 are formed of the same layer. <P>COPYRIGHT: (C)2013,JPO&INPIT |
