发明名称 |
VAPOR COMPRESSION REFRIGERATION CHUCK FOR ION IMPLANTERS |
摘要 |
Aspects of the present invention relate to ion implantation systems that make use of a vapor compression cooling system. In one embodiment, a thermal controller in the vapor compression system sends refrigeration fluid though a compressor and a condenser according to an ideal vapor compression cycle to help limit or prevent undesired heating of a workpiece during implantation, or to actively cool the workpiece. |
申请公布号 |
KR20130038247(A) |
申请公布日期 |
2013.04.17 |
申请号 |
KR20127027111 |
申请日期 |
2011.03.16 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
LEE WILLIAM;PUROHIT ASHWIN;LAFONTAINE MARVIN |
分类号 |
H01L21/683;H01L21/02 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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