| 摘要 |
PURPOSE: A transfer robot and a vacuum apparatus are provided to improve throughput and lower the height of the transfer robot and the vacuum apparatus. CONSTITUTION: An upper transfer device includes a first upper driving arm(21) fixed by a first driving shaft(11) and a second driving shaft(12); and a second upper driving arm(22). The upper transfer device has an upper transfer module(43,44) formed in the end part of a fifth upper driving arm. A lower transfer device includes a first lower driving arm fixed by the second driving shaft and a third driving shaft(13); and a second lower driving arm(52). The lower transfer device has a lower transfer module(73,74) formed in the end part of a fifth driving arm. The upper transfer device includes a first upper parallel crank tool(4) and a second upper parallel crank tool(5). The lower transfer device includes a first lower parallel crank tool(6) and a second lower parallel crank tool(7).
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