发明名称 |
SURFACE FEED-IN ELECTRODE FOR DEPOSITION OF THIN FILM SOLAR BATTERY AND SIGNAL FEED-IN METHOD THEREOF |
摘要 |
The present invention discloses a surface feed-in electrode structure for thin film solar cell deposition, relating to solar cell technologies. The surface feed-in electrode structure uses a signal feed-in component with a flat waist and a semicircular feed-in end to connect the signal feed-in port by surface contact. The signal feed-in port is located in a hallowed circular area of a center of the backside of a cathode plate, and feeds in an RFNHF power supply signal. An anode plate is grounded. The cathode plate is insulated with a shielding cover, and a through-hole is configured on the shielding cover. The effects include that, by using the surface feed-in at the center of the electrode plate, the feeding line loss of single-point or multi-point feed-in configurations can be overcome. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced. |
申请公布号 |
EP2581949(A1) |
申请公布日期 |
2013.04.17 |
申请号 |
EP20100852666 |
申请日期 |
2010.10.21 |
申请人 |
SHENZHEN TRONY SCIENCE & TECHNOLOGY DEVELOPMENT CO., LTD. |
发明人 |
HU, SHENGMING;LI, YI;HE, ZHUBING;LI, ZHIJIAN;ZHOU, JIANHUA;WANG, CHUNZHU |
分类号 |
H01L31/18;C23C16/24;C23C16/505;H01J37/04;H01J37/32 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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