| 摘要 |
An interferometric modulator is formed by a stationary layer and a mirror facing the stationary layer. The mirror is movable between an undriven position and a driven position. Landing pads, bumps or spring clip are formed on at least one of the stationary layer and mirror. The landing pads, bumps or spring clips can prevent the stationary layer and mirror from contacting each other when the mirror is in the driven position. The spring clips exert force on the mirror toward the undriven position when the mirror is in the driven position and in contact with the spring clips. |
