ATMOSPHERIC LOW-TEMPERATURE MICRO PLASMA JET DEVICE FOR BIO-MEDICAL APPLICATION

摘要

There are provided an atmospheric low-temperature micro plasma jet device for bio-medical application comprising an electrode used as an anode, a gas injection pipe used as a cathode, a porous insulating material, a protection pipe, and an insulating case and manufacturing method therefor using micromachining such as microelectromechanical systems (MEMS) in such a way that a diameter of micro electrodes where plasma is jetted is several tens micrometers or less.