| 摘要 |
A sub-atmospheric pressure gas scrubber 100 suitable for use upstream of a vacuum pump, the gas scrubber comprises a vessel 12 and means for forming a spray of cleaning solvent 22, 222 within the vessel, the vessel comprises an inlet 14 and an outlet 16 for the gas to be cleaned at sub-atmospheric pressure. The inlet and outlet are arranged to cause the gas to be cleaned to pass through the spray of cleaning solvent. The means for forming a spray comprises a cleaning solvent inlet 24 connected to at least one spray nozzle and a cleaning solvent outlet 28 through which used solvent can be pumped from the vessel using a pump 102. The pump is arranged to re-circulate the used solvent back to the cleaning solvent inlet. Advantageously the sub-atmospheric pressure gas scrubber uses re-circulated cleaning solvent to minimise the amount of contaminants that pass through an upstream vacuum pump. Also disclosed is a further invention directed to a sub-atmospheric pressure gas scrubber characterised by a plurality of spray nozzles each nozzle arranged to form an overlapping spray pattern. |
