发明名称 |
Apparatus and method for producing trichlorosilane |
摘要 |
<p>An apparatus and a method for producing trichlorosilane are provided, which effectively suppresses the reaction converting trichlorosilane to tetrachlorosilane and the formation of polymers, thereby achieving a high recovery ratio of trichlorosilane. The apparatus for producing trichlorosilane includes: a converter reactor for converting a raw material gas containing tetrachlorosilane and hydrogen into a reaction product gas; a cooler for cooling the reaction product gas fed from the converter reactor; and a plurality of provided in the cooler for spraying cooling liquids. Average droplet diameters of the cooling liquids sprayed from a plurality of the nozzles are different from each other, and a cooling liquids volume sprayed from each of the plurality of nozzles is able to be individually adjusted.</p> |
申请公布号 |
EP2233436(B1) |
申请公布日期 |
2013.04.17 |
申请号 |
EP20100156111 |
申请日期 |
2010.03.10 |
申请人 |
MITSUBISHI MATERIALS CORPORATION |
发明人 |
SAIKI, WATARU;AKBAY, TANER |
分类号 |
C01B33/107;B01J19/00;B01J19/26;B21B45/02 |
主分类号 |
C01B33/107 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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