发明名称 |
Acceleration sensor having polarized piezoelectric layer interposed between sensing electrodes |
摘要 |
An acceleration sensor includes a piezoelectric layer formed on a substrate, and sensing electrodes formed in the piezoelectric layer. In the acceleration sensor, the piezoelectric layer interposing between the sensing electrodes is polarized in a film thickness direction of the piezoelectric layer. |
申请公布号 |
US8421312(B2) |
申请公布日期 |
2013.04.16 |
申请号 |
US201113328087 |
申请日期 |
2011.12.16 |
申请人 |
AOKI TSUYOSHI;KURIHARA KAZUAKI;UMEMIYA SHIGEYOSHI;FUJITSU LIMITED |
发明人 |
AOKI TSUYOSHI;KURIHARA KAZUAKI;UMEMIYA SHIGEYOSHI |
分类号 |
H01L41/04 |
主分类号 |
H01L41/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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