发明名称 |
Boundary acoustic wave device having an interdigital transducer electrode in a groove |
摘要 |
A boundary acoustic wave device includes a piezoelectric substrate having an upper surface in which grooves are provided, IDT electrodes which are at least partially embedded in the grooves in the upper surface of the piezoelectric substrate in a thickness direction of the IDT electrodes, and first and second dielectric layers stacked on the upper surface of the piezoelectric substrate. The second dielectric layer has an acoustic velocity greater than that of the first dielectric layer. |
申请公布号 |
US8421558(B2) |
申请公布日期 |
2013.04.16 |
申请号 |
US20100752167 |
申请日期 |
2010.04.01 |
申请人 |
YAMANE TAKASHI;MURATA MANUFACTURING CO., LTD. |
发明人 |
YAMANE TAKASHI |
分类号 |
H03H9/13;H03H9/145;H03H9/15;H03H9/25 |
主分类号 |
H03H9/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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