发明名称 Nano-crystal diamond film, manufacturing method thereof, and device using nano-crystal diamond film
摘要 A nano-crystal diamond film synthesized on a substrate and containing, as a major component, nano-crystal diamond having a grain diameter from 1 nm to less than 1000 nm. This nano-crystal diamond film can be formed on a substrate by means of a plasma CVD method using a raw material gas containing a hydrocarbon and hydrogen, allowing the formation of the nano-crystal diamond film to take place outside the plasma region. This nano-crystal diamond film is applicable to the manufacture of an electrochemical device, an electrochemical electrode, a DNA chip, an organic electroluminescent device, an organic photoelectric receiving device, an organic thin film transistor, a cold electron-emission device, a fuel cell and a catalyst.
申请公布号 US8420043(B2) 申请公布日期 2013.04.16
申请号 US20060598680 申请日期 2006.11.14
申请人 GAMO HIDENORI;ANDO TOSHIHIRO;TOPPAN PRINTING CO., LTD.;NATIONAL INSTITUTE FOR MATERIALS SCIENCE 发明人 GAMO HIDENORI;ANDO TOSHIHIRO
分类号 B01J2/00;B01J3/06;B32B5/16;C23C16/27;C30B25/02;C30B25/10;C30B29/04;C30B29/60;G01N15/06;G01N27/26;H01L29/04;H01L29/08;H01L29/10;H01L31/00;H01M2/00;H05H1/24 主分类号 B01J2/00
代理机构 代理人
主权项
地址