发明名称 |
Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch |
摘要 |
Methods for Implementation of a Switching Function in a Microscale Device and for Fabrication of a Microscale Switch. According to one embodiment, a method is provided for implementing a switching function in a microscale device. The method can include providing a stationary electrode and a stationary contact formed on a substrate. Further, a movable microcomponent suspended above the substrate can be provided. A voltage can be applied between the between a movable electrode of the microcomponent and the stationary electrode to electrostatically couple the movable electrode with the stationary electrode, whereby the movable component is deflected toward the substrate and a movable contact moves into contact with the stationary contact to permit an electrical signal to pass through the movable and stationary contacts. A current can be applied through the first electrothermal component to produce heating for generating force for moving the microcomponent. |
申请公布号 |
US8420427(B2) |
申请公布日期 |
2013.04.16 |
申请号 |
US20060492671 |
申请日期 |
2006.07.25 |
申请人 |
CUNNINGHAM SHAWN JAY;DEREUS DANA RICHARD;SETT SUBHAM;GILBERT JOHN;WISPRY, INC. |
发明人 |
CUNNINGHAM SHAWN JAY;DEREUS DANA RICHARD;SETT SUBHAM;GILBERT JOHN |
分类号 |
H01L21/00;B81B3/00;B81B7/00;H01H1/04;H01H1/50;H01H59/00;H01H61/04;H01L21/302;H01L23/373;H01L23/522;H01L27/12;H01L29/86;H02N1/00;H02N10/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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