发明名称 |
Semiconductor integrated circuits including optoelectronic device for changing optical phase |
摘要 |
Provided is a semiconductor integrated circuit. The semiconductor integrated circuit includes a semiconductor pattern disposed on a substrate and including an optical waveguide part and a pair of recessed portions. The optical waveguide part has a thickness ranging from about 0.05 μm to about 0.5 μm. The recessed portions are disposed on both sides of the optical waveguide part and have a thinner thickness than the optical waveguide part. A first doped region and a second doped region are disposed in the recessed portions, respectively. The first and second doped regions are doped with a first conductive type dopant and a second conductive type dopant, respectively. An intrinsic region is formed in at least the optical waveguide part to contact the first and second doped regions. |
申请公布号 |
US8422834(B2) |
申请公布日期 |
2013.04.16 |
申请号 |
US20080746167 |
申请日期 |
2008.06.03 |
申请人 |
PARK JEONG-WOO;KIM GYUNG-OCK;PARK MI-RAN;YOU JONG-BUM;ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
PARK JEONG-WOO;KIM GYUNG-OCK;PARK MI-RAN;YOU JONG-BUM |
分类号 |
G02F1/035;G02B6/10;G02B6/12;G02F1/295 |
主分类号 |
G02F1/035 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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