发明名称 |
High frequency deflection measurement of IR absorption |
摘要 |
An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Significant issues as to size, cost of implementation, and repeatability/robustness of results exist in commercializing the technique. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.
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申请公布号 |
US8418538(B2) |
申请公布日期 |
2013.04.16 |
申请号 |
US201113289640 |
申请日期 |
2011.11.04 |
申请人 |
DAZZI A. DAZZI;POLICAR CLOTILDE;KJOLLER KEVIN;READING MICHAEL;VODOPYANOV KONSTANTIN;PRATER CRAIG;ANASYS INSTRUMENTS INC. |
发明人 |
DAZZI A. DAZZI;POLICAR CLOTILDE;KJOLLER KEVIN;READING MICHAEL;VODOPYANOV KONSTANTIN;PRATER CRAIG |
分类号 |
G01B5/28;G01Q60/24;G01N21/84;G01Q60/34 |
主分类号 |
G01B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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