| 摘要 |
PURPOSE: A transfer apparatus is provided to prevent the adsorption of monomolecular materials to a transfer screw, thereby reducing the abrasion of the transfer screw and the load of a drive motor. CONSTITUTION: A transfer apparatus comprises a heating unit(220) which heats a monomolecular material, a cooling plate(230) which blocks the heat of the heating unit from flowing into a chamber, a reflective plate(240) which reflects the peripheral radiant heat of the heating unit, a carrier(120) which supports a substrate, a transfer screw(210) which is coupled with the carrier to transfer the carrier, and an LM guide(250) which is arranged in parallel to the transfer screw and transfers the carrier. |
