发明名称 COATING FLUID FOR BORON DIFFUSION
摘要 <p>PURPOSE: A coating fluid for diffusing boron is provided to coat a substrate with sufficient impurities after a spin coating process. CONSTITUTION: An n-type silicon substrate(1) is provided. One surface of the silicon substrate is coated with a coating fluid. A p-type diffusion layer(2) is formed on the silicon substrate. An n-type diffusion layer(3) is formed on the remaining surface of the silicon substrate. A front electrode(6) and a rear electrode(5) are formed on the front and the rear of the silicon substrate, respectively. The coating fluid includes a boron compound, an organic binder, a silicon compound, an alumina precursor, water, and/or organic solvents.</p>
申请公布号 KR20130037173(A) 申请公布日期 2013.04.15
申请号 KR20120109830 申请日期 2012.10.04
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 TSUKIGATA SHINTAROU;MATSUOKA TOSHIFUMI;WATABE TAKENORI;OTSUKA HIROYUKI
分类号 H01L21/22;C09D129/04;H01L31/042 主分类号 H01L21/22
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