发明名称 |
APPARATUS FOR TESTING AND REPAIRING OF SUBSTRATE |
摘要 |
PURPOSE: A substrate inspection and a repair apparatus is provided to inspect the substrate conveniently by a worker, to reduce the installation space, and to cut down costs at the same time. CONSTITUTION: A substrate inspection and a repair apparatus comprise a table(100); an inspection unit(200) which mounts and supports a substrate in which a positive pole line and a cathode line are formed, have a plurality of probe supplying the power to the substrate, inspects the deformity of the substrate, and is installed so that the other side is rotatable from one side on the table(100); and a repair unit(300) installed on the table to be transferrable to X-axis and Y-axis directions, and repairs the defect part of the substrate.
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申请公布号 |
KR20130036996(A) |
申请公布日期 |
2013.04.15 |
申请号 |
KR20110101297 |
申请日期 |
2011.10.05 |
申请人 |
CHARM ENGINEERING CO., LTD. |
发明人 |
KANG, DO HWAN;KIM, HYUN JUNG;CHO, KYE BONG;WON, YONG YON |
分类号 |
G01R31/02 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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