发明名称 PREPARATION METHOD OF POLY-URETHANE MOUNTING PAD
摘要 PURPOSE: A method for manufacturing a polyurethane support pad is provided to uniformly perform a polishing process with high efficiency and to uniformize a thickness, pressure, or tension in a pad region. CONSTITUTION: A resin composition with polyurethane resins and DMF solvents is wet-congealed. A wet congelation is cleaned and dried. The surface of the wet congelation is polished. An adhesive layer is formed on the surface of the polished wet congelation. The wet congelation with an adhesive layer is thermally treated.
申请公布号 KR20130037192(A) 申请公布日期 2013.04.15
申请号 KR20120110676 申请日期 2012.10.05
申请人 LG CHEM. LTD. 发明人 SHIN, DONG MOK;AHN, BYEONG IN;CHOI, SANG SOON;TAE, YOUNG JI;YOON, KEONG YEON;KIM, NA RI
分类号 H01L21/304;B24B37/24;B24B41/06;C08J9/24 主分类号 H01L21/304
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