| 摘要 |
PURPOSE: A vacuum absorption apparatus is provided to configure each vacuum absorption hole in dual structures and to configure a residual removing hole. CONSTITUTION: A vacuum absorption panel(20) is combined with a vacuum guide panel(10). The vacuum absorption panel includes a plurality of vacuum absorption holes(22a,22b). A plurality of the vacuum absorption holes is penetrated through a vacuum flow path. A sealing member(30) seals a space between the vacuum absorption panel and the vacuum guide panel. The vacuum absorption hole includes a first absorption hole and a second absorption hole. A residue removing hole includes first and second removing holes(24a,24b). |
