| 摘要 |
PURPOSE: An EFEM(Equipment Front End Module) buffer module is provided to stably input a wafer into an EFEM device by keeping the wafer clean between the EFEM devices. CONSTITUTION: An EFEM buffer module delivers a processed wafer to an EFEM. Two fixing brackets(210) are arranged to face each other. A buffer housing(220) is respectively combined with the fixing brackets and includes a shutter(221). An arrangement plate connects the fixing brackets and includes a cassette mounting unit mounting a cassette with the wafer. A top cover(240) connects an upper side of the buffer housing. A side cover(250) respectively connects both sides of the buffer housing. |
