| 摘要 |
PURPOSE: A protection seal plate and an electronic component manufacturing apparatus including the same are provided to reduce process time by replacing an inner separation member when an outer sealing member is replaced. CONSTITUTION: A substrate of a chamber enters an entrance. A door plate(320) moves to the entrance to block the entrance from the outside. An inner separation member(330) firstly separates the inner space of the chamber from the outside. An outer sealing member(340) is mounted on the door plate and secondly seals the inner space. |
