| 摘要 |
PURPOSE: An ultra-low cooling device, a cryo pump, and a displayer are provided to maintain high reliability regardless of changes in temperature. CONSTITUTION: An ultra-low cooling device enables to increase temperature by rotating a motor(M), which drives displacers(13,14), in a direction opposite to a rotating direction in cooling. The displacers are formed of a displacer container(14A), and a resin film(14B) on the outer circumference. The thickness of a high temperature side of the resin film is set to be thinner than that of a low temperature side. |
