METHOD AND SYSTEM FOR MEASURING THICKNESS AND SURFACE PROFILE

摘要

PURPOSE: A thickness measuring system and a method for measuring a shape and thickness are provided to measure the thickness and a shape of a target object regardless of transparency. CONSTITUTION: A thickness measuring system comprises a light source(10), a lens(20), a beam splitter(30), a reference mirror(40), a scanner(50), an infrared camera(60), a numerical calculation part(70), and a thickness conversion part(80). The light source generates lights of an infrared region. The lens is arranged in the front side of the light source. The beam splitter disperses the lights have passed through the lens into reference lights(121) and reference lights(122,123), thereby respectively irradiating to the reference mirror and a target object. The scanner detects a plurality of first and second interference patterns. [Reference numerals] (10) Light source; (50) Scanner; (60) Infrared camera; (70) Numerical calculation part; (80) Thickness conversion part;