COIL EDDY CURRENT DAMPER WITH A SWITCH OF OPENING AND CLOSING CICUIT AND MOTION STAGE HAVING THE SAME

摘要

PURPOSE: A coil eddy current attenuator comprising a circuit switch, and a motion stage including the same are provided to enhance productivity by controlling attenuation with a simple switching operation. CONSTITUTION: A coil(210) is formed with a conductive material. The coil is arranged in the moving direction of a magnet track(20). A switch(220) is connected to both end parts of the coil. The switch is switched between a closed state and an open state. A control part switches the switch based on received data.