| 摘要 |
PURPOSE: A substrate coating apparatus is provided to spread a liquid chemical on the surface of a substrate by reducing transferring distance of a slit nozzle and to conduct a coating process in a short time. CONSTITUTION: A substrate coating apparatus(100) comprises a substrate stage(110), a slit nozzle(120), a nozzle transferring apparatus(125), and a nozzle washer(130). The substrate stage mounts an untreated substrate. The slit nozzle spreads liquid chemical on the surface of the untreated substrate. The nozzle transfer apparatus moves the slit nozzle along the substrate stage. The nozzle washer moves around the outlet of the slit nozzle and washes both sides of the outlet. During moving the slit nozzle, the side of the slit nozzle is washed by the nozzle washer. |
