SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To reduce an image drift occurring while measuring a plurality of points in a sample.

SOLUTION: A static elimination is conducted after acquiring a length measurement image by electron beam irradiation with a scanning at a magnification lower than that of a scanning for length measurement image acquisition. At that time, a magnification is so set that a scanning area becomes 20 μm square or larger and 200 μm square or smaller.

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