| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect checking device and a defect checking method improved in abnormal pattern distinguishing capability. <P>SOLUTION: A defect checking device comprises a light source, an interference controller and a checking device body. The light source radiates coherent light. The interference controller, having a disperser and a selector, controls the coherence of the light radiated from the light source to output the light as illuminating light. The checking device body irradiates a pattern formed on a checkup object with the illuminating light to check for any defect in the checkup object. Where the direction of the light radiated from the light source being designated as a first direction and a direction normal to the first direction as a second direction, the disperser expands the light radiated from the light source in the second direction according to its wavelength and subjects the light to wavelength dispersion, while the selector selectively passes the light subjected to wavelength dispersion by the disperser. <P>COPYRIGHT: (C)2013,JPO&INPIT |
