| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide specialty ceramic materials which resist corrosion/erosion under semiconductor processing conditions which employ a corrosive/erosive plasma. <P>SOLUTION: A ceramic-containing product has a surface that contains a solid solution, wherein the solid solution comprises: about 55 to 80 mol% of yttrium oxide; about 5 to 25 mol% of zirconium oxide; and about 5 to 25 mol% of hafnium oxide, niobium oxide, or their combination. The specialty ceramic materials have been modified to provide a controlled electrical resistivity which suppresses plasma arcing potential. <P>COPYRIGHT: (C)2013,JPO&INPIT |
