| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten the raising time significantly, to prevent occurence of overshoot or undershoot at the time of raising even in a high voltage generator in which a target voltage is set over a wide range, and to make the output voltage reach a target voltage in a short time. <P>SOLUTION: The high voltage generator comprises: a PWM control voltage generation circuit 10 which performs the raising control for raising the voltage, in the raising control, at a predetermined rate of change until a voltage Vdt detected by an output voltage detection circuit 4 reaches a transient voltage value Vtgt1 smaller than a target voltage value Vtgt, and after the voltage Vdt detected by an output voltage detection circuit 4 reached the transient voltage value Vtgt1, raising the voltage to the target voltage value Vtgt at a rate of change smaller than the predetermined rate of change; and a transient target value generation circuit 17 which sets a smaller transient voltage value Vtgt1 for a smaller target voltage value Vtgt. <P>COPYRIGHT: (C)2013,JPO&INPIT |
