A method for creating a nanoimprint lithography template includes exposing (600) a mass transport layer of material adjacent to a support substrate to electromagnetic radiation in a predetermined pattern to form a nanoimprint lithography template in the mass transport layer.
申请公布号
WO2013010111(A3)
申请公布日期
2013.04.11
申请号
WO2012US46738
申请日期
2012.07.13
申请人
UNIVERSITY OF UTAH RESEARCH FOUNDATION;MENON, RAJESH;BRIMHALL, NICOLE
