| 发明名称 |
SELF-GETTERING DIFFERENTIAL PUMP |
| 摘要 |
A self-gettering differential pump for a molecular beam epitaxy system has a collimator with a length greater than its diameter mounted in front of a source in extended port geometry, wherein the reactant delivered by the source also serves as a gettering agent.
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| 申请公布号 |
US2013087095(A1) |
申请公布日期 |
2013.04.11 |
| 申请号 |
US201213448316 |
申请日期 |
2012.04.16 |
| 申请人 |
OH SEONGSHIK;KIM YONG-SEUNG;RUTGERS, THE STATE UNIVERSITY OF NEW JERSEY |
发明人 |
OH SEONGSHIK;KIM YONG-SEUNG |
| 分类号 |
F04B37/02;C30B25/08 |
主分类号 |
F04B37/02 |
| 代理机构 |
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