发明名称 |
ELECTRICALLY ACTUATED SWITCH |
摘要 |
A method of manufacturing an electrically actuable switch and comprising: depositing a first electrode on a surface; depositing an active layer or layers on top of said first electrode; and depositing a second electrode on top of said active layer(s), wherein said step of depositing an active layer or layers is performed in an atmosphere into which a reactive gas is introduced, the partial pressure of the reactive gas being varied during the process so as to introduce dopants into the active layer in a concentration which varies across the active layer.
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申请公布号 |
US2013087755(A1) |
申请公布日期 |
2013.04.11 |
申请号 |
US201113520930 |
申请日期 |
2011.01.06 |
申请人 |
PRODROMAKIS THEMISTOKLIS;TOUMAZOU CHRISTOFER;MICHELAKIS KONSTANTINOS |
发明人 |
PRODROMAKIS THEMISTOKLIS;TOUMAZOU CHRISTOFER;MICHELAKIS KONSTANTINOS |
分类号 |
H01L45/00 |
主分类号 |
H01L45/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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