| 摘要 |
The present invention provides a plasma generation device (100) that not only increases the generation amount of active species, but also improves safety and is hardly affected by humidity changes. The plasma generation device (100) comprises: a plasma electrode unit (2) configured so that fluid circulation holes (21b, 22b) are provided at positions corresponding to each other in a pair of electrodes (21, 22) and pass therethrough; a power supply circuit unit (51) for applying voltage between the pair of electrodes (21, 22); and a circuit control unit (52) for controlling the power supply circuit unit (51). The power supply circuit unit (51) has a transformer (511) for boosting an input voltage and outputting the boosted voltage and a switching element (512) provided in a primary winding (511a) of the transformer (511) and shaping a voltage waveform across the primary winding (511a) into a pulse waveform. The circuit control unit (52) inputs an on/off signal to the switching element (512) and thereby adjusts the peak value and pulse width of the output voltage across a secondary winding (511b) of the transformer (511). |
