COBALT-FILM-FORMING METHOD, COBALT-FILM-FORMING MATERIAL, AND NOVEL COMPOUND

摘要

Provided is a technique making it easy to form a high-quality cobalt-based film which has a low melting point and is liquid at about 40°C, is unlikely to solidify and create a blockage midway in piping, and enables a stable supply of raw material, the technique involving the use of cobalt bis(N,N'-diisopropyl-propionamidinate).