| 摘要 |
PURPOSE: A single crystal ingot growing apparatus is provided to effectively cool residual materials created during a single crystal growth process, thereby minimizing risk during the process. CONSTITUTION: A single crystal ingot growing apparatus includes an exhaust line(170). A fluid inlet hole is formed on the exhaust line. A filter(192) is connected to one end of the exhaust line. The filter is formed of metal or ceramic. A drain(194) is connected to the filter. A water supply line(191) is installed on the exhaust line. |
