| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact current sensor reduced in energy consumption and response time. <P>SOLUTION: The current sensor includes one or more current lines 10 located parallel to the plane of a metalization layer. One or more currents to be measured are supplied to these current lines 10. The coils of measuring coils 16, 18, 26, and 28 or excitation coils 36, 38, 40, and 42 are formed of conductor tracks. The conductor tracks are formed in respective metalization layers. The metalization layers are electrically connected to one another by a pad penetrating at least one of insulating layers, thereby forming coils extending along a vertical axis. <P>COPYRIGHT: (C)2013,JPO&INPIT |
