| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substance collection device and a substance collection method for collecting a substance adhering to a surface of an object and a recovering head used for the same. <P>SOLUTION: In place of a conventional substance collection device which treats a substrate with droplets, an inventive substance collection device comprises: a recovery head which faces a surface of an object when being made close to the object and forms a collection surface capable of maintaining a prescribed distance between the recovery head and the surface of the object, and which is provided with a first opening and a second opening in a part of the collection surface; a recovery liquid bottle which can reserve a liquid capable of capturing the substance; a liquid sending device which blows off the liquid from the first opening; and a liquid returning device which returns the liquid sucked from the second opening to the recovery liquid bottle. <P>COPYRIGHT: (C)2013,JPO&INPIT |
