发明名称
摘要 <p>In one example embodiment, a method includes depositing one or more thin-film layers onto a substrate. More particularly, at least one of the thin-film layers comprises at least one electropositive material and at least one of the thin-film layers comprises at least one chalcogen material suitable for forming a chalcogenide material with the electropositive material. The method further includes annealing the one or more deposited thin-film layers at an average heating rate of or exceeding 1 degree Celsius per second. The method may also include cooling the annealed one or more thin-film layers at an average cooling rate of or exceeding 0.1 degrees Celsius per second.</p>
申请公布号 JP2013512576(A) 申请公布日期 2013.04.11
申请号 JP20120541188 申请日期 2010.11.24
申请人 发明人
分类号 H01L31/04 主分类号 H01L31/04
代理机构 代理人
主权项
地址