发明名称 HANDLING DEVICE FOR SUBSTRATES USING COMPRESSED AIR
摘要 Embodiments of the invention generally include a handling device that uses compressed air to grip and move substrates between different operating positions or work stations in a production line. The handling device comprises a gripping extremity shaped so as to define a hollow seating region in which a sub-atmospheric pressure is achieved, to cause an adjacently positioned substrate to be urged towards a reception element disposed near the hollow seating region. In some embodiments, the gripping extremity is shaped in a wing shaped profile, or substantially curvilinear, so as to make the air flow, which flows through the discharge apertures formed between the substrate, reception element and the gripping extremity, to be laminar.
申请公布号 US2013088029(A1) 申请公布日期 2013.04.11
申请号 US201113575018 申请日期 2011.01.26
申请人 ROCCO GIORDANO;APPLIED MATERIALS, INC. 发明人 ROCCO GIORDANO
分类号 B25J15/06 主分类号 B25J15/06
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