发明名称 |
DOUBLE LAYER TRANSFER METHOD |
摘要 |
<p>Method of transferring a layer (1) comprising: a) providing a layer (1) integral with an initial substrate with a binding energy EO; b) bonding a front face (8) of the layer (1) to an intermediate substrate (5) according to an intermediate binding energy Ei; c) detaching the initial substrate from the layer (1) e) bonding a rear face to a final substrate (11) according to a final binding energy Ef; and f) detaching the intermediate substrate (5) from the layer (1) to transfer the layer (1) to the final substrate (11); step b) comprising a step of forming Si-O-Si siloxane bonds, step c) being carried out in a first anhydrous atmosphere and step f) being carried out in a second humid atmosphere in such a way that intermediate binding energy Ei takes a first value Ei1 in step c) and a second value Ei2 in step f), where Ei1 > E0 and Ei2 < Ef.</p> |
申请公布号 |
WO2013050683(A1) |
申请公布日期 |
2013.04.11 |
申请号 |
WO2012FR52100 |
申请日期 |
2012.09.20 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES |
发明人 |
FOURNEL, FRANK;ARGOUD, MAXIME;DA FONSECA, JEREMY;MORICEAU, HUBERT |
分类号 |
H01L21/18;H01L21/20 |
主分类号 |
H01L21/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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