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发明名称
Verfahren und Vorrichtung zur Herstellung von Halbleiter- und Metallscheiben oder -folien
摘要
申请公布号
DE10047929(B4)
申请公布日期
2013.04.11
申请号
DE2000147929
申请日期
2000.09.27
申请人
RGS DEVELOPMENT B.V.
发明人
HOEFS, HANS-ULRICH, DIPL.-CHEM. DR.;KUHN, RALF;LAMBERT, HANS-ULRICH;KOWITZ, ULRICH;STEINBACH, INGO, DIPL.-PHYS.
分类号
C30B11/00;C30B15/00;C30B29/60;C30B29/64
主分类号
C30B11/00
代理机构
代理人
主权项
地址
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